Toward Inertial-Navigation-on-Chip: The Physics and Performance Scaling of Multi

Description: Toward Inertial-Navigation-on-Chip by Haoran Wen This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. FORMAT Hardcover LANGUAGE English CONDITION Brand New Publisher Description This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation. Back Cover This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation. Author Biography Haoran Wen is a research engineer in the School of Electrical and Computer Engineering at Georgia Tech. He received his PhD from Georgia Tech in 2018. Table of Contents Chapter1: Introduction.- Chapter2: The physics of resonant mems gyroscopes.- Chapter3: Bias control in pitch and roll gyroscopes.- Chapter4: Scale-factor enhancement.- Chapter5: Integrated inertial measurement unit.- Chapter6: Bias stability limit in resonant gyroscopes.- Chapter7: Conclusions and future work. Feature Nominated as an outstanding PhD thesis by Georgia Institute of Technology Provides an accessible introduction to resonator gyroscopes Presents insights that increase understanding of bias instability in resonant gyroscope technology Demonstrates a new processing technique which overcomes limitations of current gyroscopes Details ISBN3030254690 Author Haoran Wen Pages 127 Series Springer Theses Year 2019 ISBN-10 3030254690 ISBN-13 9783030254698 Format Hardcover Publication Date 2019-09-25 Short Title Toward Inertial-Navigation-On-Chip Language English DOI 10.1007/978-3-030-25470-4 UK Release Date 2019-09-25 Edition 1st Imprint Springer Nature Switzerland AG Place of Publication Cham Country of Publication Switzerland Publisher Springer Nature Switzerland AG Edition Description 1st ed. 2019 Subtitle The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes Alternative 9783030254728 DEWEY 530.8 Audience Professional & Vocational Illustrations 83 Illustrations, color; 9 Illustrations, black and white; XIII, 127 p. 92 illus., 83 illus. in color. 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