The Science and Engineering of Microelectronic Fabrication, by Stephen Campbell

Description: Normal 0 false false false EN-US X-NONE X-NONE The Science and Engineering of Microelectronic Fabrication, by Stephen Campbell The Oxford Series in Electrical Engineering, Van Valkenburg, Senior Consulting Editor; Adel Sedra, Series Editor Electrical Engineering; and Michael Lightner, Series Editor Computer Engineering. A well-qualified and worthy series led by the notable Van Valkenburg. The book list included in this series is a go-to reading / study / reference list. Hardcover 536 Pages Firm Good Binding Table of Contents by Chapter Part 1 Overview and Materials Introduction to Microelectronic Fabrication Semiconductor Substrates Part 2 Hot Processing and Ion Implantation Diffusion Thermal Oxidation Ion Implantation Rapid Thermal Processing -- Some Highlighting Noted in This Chapter -- Part 3 Pattern Transfer Optical Lithography Photo Resists Non-Optical Lithographic Techniques Vacuum Science and Plasmas Etching Part 4 Thin Films Physical Deposition, Evaporation and Sputtering Chemical Vapor Deposition Epitaxial Growth Part 5 Process Integration Device Isolation, Contacts, and Metalization CMOS Technologies Gaas F E T Technologies Silicon Bipolar Technologies Integrated Circuit Manufacturing Appendices Acronyms and Common Symbols Properties of Semiconductor Materials Physical Constants Conversion Factors The Complementary Error Function F Values SUPREM Commands Index

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End Time: 2025-01-25T23:51:25.000Z

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