Description: This is a used MFC controller that is fully operational and in good working order. It came of a dry etcher that was getting process gas upgrades for new etching process recipes. This MFC has been purged with argon (Ar) gas prior to removal of tool to ensure safety and handling. If there are any problems with this unit, please don't hesitate to send us a message so we can remedy the situation with a return/refund. We want to provide our customers with the best service and parts. We buy our inventory from local precision manufacturers within the semiconductor community to ensure quality and OEM performance standards. For custom quantities, please send us a message inquiry and we can get you a quote. If there are any issues with your order, please reach out and we will be glad to help. OverviewThe SEC-Z700X Series is equipped with reliable thermal sensors and Pressure Insensitive function for stable flow rate control. On-board pressure measurement reduces the cost, size and complexity of gas delivery systems. FeaturesMulti Gas / Multi Range functionThe gas type and full scale flow rate can be changed by the customer.Variable PID function gives high speed response (within 1 sec) across the whole flow range.Compact gas lineNo need for the regulator, transducer and filter.Stable control of the gas flow without effect by upstream and downstream pressure fluctuations.Integrated Inlet Pressure Sensor.On board Multi display.Warranty 1% Set Point high accuracy.Ultra clean design - Metal diaphragm, all stainless SUS-316L and polished surface treatment(standard).Compact sizeSame fitting to fitting dimension up to 50 SLM.Signal compatibilityAnalog/RS485 Digital Model , DeviceNet™ Model.Network functionControlled by digital signal. Measurement TechniquesPressure InsensitiveA new high-performance function provides a simplified gas supply systems. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid mass flow controller crosstalk phenomenon caused by pressure fluctuations. SEC-Z700X Series exhibit high stability and control the gas flow without effect of upstream and downstream pressure fluctuations. They not only give a flow rate output but also the temperature and pressure readings.
Price: 99.99 USD
Location: Hillsboro, Oregon
End Time: 2024-07-30T09:26:34.000Z
Shipping Cost: N/A USD
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Item Specifics
Return shipping will be paid by: Buyer
All returns accepted: Returns Accepted
Item must be returned within: 30 Days
Refund will be given as: Money Back
Return policy details:
Brand: Horiba
Maximum Flow Rate: 30 SCCM
MPN: SEC-Z714JX
Country/Region of Manufacture: Japan
Unit Quantity: 1
Gas Media: SiCl4 [Silicon Tetrachloride]
